|
|
 |
|
 |
Patents and Publications
|
Issue:
|
April 29, 2011
|
Download (PDF, 425 KB)
|
|
Patent:
|
Methods of jointing polyethylene film to Silicon substrate and Silicon element with polyethylene antireflective coating deposed by mentioned method ( THz AR Coatings) The priority date is October 4, 2010 |
|
|
 |
|
| |
|
|